The WS-650MZ-23NPPB Spin Coater from Laurell with automatic speed and steps programming. Up to 150 mm wafers can be accommodated with a spin speed range between 0-12,000 rpm.
The Glovebox-Integrated Sawatec SM-150 Spin Coater is a programmable air-free spin coater wall-mounted in a nitrogen MBraun Glovebox. Up to 150 mm wafers can be accommodated; spin speed range between 0-10,000 rpm.